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Hitachi ULSI Systems

Hitachi

Map of Technologies

image : Map of Technologies

Major Design Experience and Technologies from Here

Device Model Extraction

image : Device Model Extraction

By applying our simulators to the extraction of model parameters for semiconductor devices (transistors, resistors, etc.), we can contribute to high-precision circuit validation.

Distinctive points

  1. A rich track record, extending over more than 15 years
  2. Provision of high-precision device models
  3. Consistent support:TEG concept and design->Modeling->Product design environment (PDK*)
*
Product design kit

IBIS (I/O Buffer Information Specification) Model Creation

image : Flow of IBIS Model Extraction

We provide an industry-standard model for the simulation of transmission lines.

Features

  1. Proven track record on more than 1000 products
  2. High-quality IBIS models
  3. IBIS models for inter-module interfaces
  4. Expediting compliance with the recommendations on IBIS quality from the EIA-IBIS Committee

EDA Environments

image : EDA Environments

  • The environments we provide can fully satisfy any requirements for customization.
  • Our total design environments cover everything from circuit and layout design to validation.

CIM System-VCIM
VCIM : most Valuable Computer Integrated Manufacturing

image : CIM System-VCIM

Our many years of practical experience are the basis for providing extensible systems.

  • Application of an industry-standard open system
  • Supports the Sematech CIM framework
  • Supports next-generation technology for control of wafers and other sheet materials This distributed system architecture has superior expandability and resistance to defects, and is in service at more than 100 sites of more than 45 companies, both domestic and overseas.

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FIB (Focused Ion Beam) Processing Services

Features

  • Quick delivery (minimum time is only one day)
  • Supporting various sample geometries
  • Supporting all kinds of layout information
  • Supporting all kinds of processes, even with new materials
  • Applicable within clean rooms
  • Capable of large-volume processing

Changes to logic

image : Changes to logic

By opening or connecting wiring in the region of interest, this processing is capable of making changes to logic.

Connections to high aspect-ratio holes

image : Connections to high aspect-ratio holes

This processing is capable of connections with holes having aspect ratios up to about 10 at their openings.

Analysis and Evalutions Solutions

Analysis of bad placement specifications

image : Analysis of bad placement specifications

  • Well-level photoemission analysis
  • Chip back-face photoemission analysis
  • Estimated wiring characteristics analysis (by EBAC*1)

Evaluation of device reliability

  • Hot carriers, EM characteristics, TDDB*2, etc.
  • Extreme-low-current analysis (fA order)
  • Device temperature characteristics
*1
Electron beam absorption current
*2
Time-dependent dielectric breakdown

ROM Programming Services

image : Electronic request system and quick delivery

Electronic request system and quick delivery

Production Support Services

  • Support covers everything from post-design mask production, through arrangements for trial production, testing and evaluation (of reliability), and defect analysis, to the creation of the documents for use in mass-production

image : Production Support Services

  • TEG layout design, placement, and mask handling services

image : TEG layout design, placement, and mask handling services

Applying TEG in Various Kinds of Evaluation and Consulting

We provide TEG for use in evaluation during the development of processes, fabrication devices, and materials.

image : Applying TEG in Various Kinds of Evaluation and Consulting

  • A consistent approach covers all stages from the design of masks and processes to TEG evaluation.
  • Systematic and qualitative evaluation and consultation on the margins of characteristics and processes.

image : Wafer processing, Mounting, PCB for use in evaluation